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An ultrapure colloidal silica dispersion comprising colloidal silica particles having a mean or aggregate particle size from about 10 to about 200 nm, wherein the ...

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Composition for polishing surfaces comprises a lanthanide oxide abrasive, a polymeric dispersant, a polysaccharide gelling agent and water. An independent claim is ...

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In CMP technology for planarizing an interlayer insulation film, a BPSG film, an insulation film for shallow trench isolation, or the like, in the production process ...

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